1.

Conference Proceedings
Conference Proceedings
1. *CHARACTERIZATION OF THIN FILMS USING MICROMECHANICAL STRUCTURES
Pratt, R.I. ; Johnson, G.C. ; Howe, R.T. ; Nikkel, Jr., D.J.
Pub. info.: Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.197-202,  1992.  Philadelphia, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 276
2.

Conference Proceedings
Conference Proceedings
2. STRESS AND MICROSTRUCTURE IN PHOSPHORUS DOPED POLYCRYSTALLINE SILICON
Krulevitch, P. ; Johnson, G.C. ; Howe, R.T.
Pub. info.: Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.79-84,  1992.  Philadelphia, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 276
3.

Conference Proceedings
Conference Proceedings
3. Resonating Microelectromechanical Structures for Metrology
Allen, A.M. ; Johnson, G.C.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
4.

Conference Proceedings
Conference Proceedings
4. LPCVD POLYCRYSTALLINE SILICON THIN FILMS: THE EVOLUTION OF STRUCTURE, TEXTURE AND STRESS
Krulevitch, R. ; Nguyen, Tai D. ; Johnson, G.C. ; Howe, R.T. ; Wenk, H.R. ; Gronsky, R.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.167-172,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
5.

Conference Proceedings
Conference Proceedings
5. MEMS process error characterization using lateral resonant structures
Johnson, G.C. ; Allen, A.M.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS III.  pp.264-272,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5343