Moon, S. ; Ahn, S. ; Kang, S. ; Choi, D. ; Je, T.-J.
Pub. info.:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia. pp.140-147, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Choi, D.-S. ; Yoo, Y.-E. ; Seo, Y. H. ; Lee, J.-H. ; Je, T.-J. ; Whang, K.-H.
Pub. info.:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.324-327, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering