Andreas Schulze ; Thomas Hantschel ; Pierre Eyben ; Anne Vandooren ; Rita Rooyackers ; Jay Mody ; Anne S. Verhulst ; Wilfried Vandervorst
Pub. info.:
Low-dimensional functional nanostructures : fabrication, characterization and applications : symposium held April 5-9, 2010, San Francisco, California. pp.59-66, 2010. Warrendale, Pa.. Materials Research Society
Jay Mody ; Pierre Eyben ; Wouter Polspoel ; Malgorzata Jurczak ; Wilfried Vandervorst
Pub. info.:
Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.. pp.49-56, 2008. Warrendale, Pa.. Materials Research Society