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Conference Proceedings

1. The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations

Pinacho, Ruth ; Jaraiz, Martin ; Gossmann, Hans J. ; Gilmer, George H. ; Benton, Janet L. ; Werner, P.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B7.2-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	610

Conference Proceedings

2. Effects Of Nonmelt Excimer Laser Annealing On 5keV Boron Implanted in Silicon

Jaraiz, Martin ; Castrillo, Pedro ; Pinacho, Ruth ; Pelaz, Lourdes ; Barbolla, Juan ; Gilmer, George H. ; Rafferty, Conor S.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.5-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	610

Conference Proceedings

3. Monte Carlo Atomistic Simulation of Polycrystalline Aluminum Deposition

Rubio, J. Emiliano ; Jaraiz, Martin ; Bailon, Luis, A. ; Barbolla, Juan ; Lopez, M. Jose ; Gilmer, George H.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.127-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

4. Atomistic Modelling of Point and Extended Defects in Crystalline Materials

Jaraiz, Martin ; Pelaz, Lourdes ; Rubio, Emiliano ; Barbolla, Juan ; Gilmer, George H. ; Eaglesham, David J. ; Gossmann, Hans J. ; Poate, John M.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.43-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532