1.

Conference Proceedings
Conference Proceedings
1. Immersion lithography exposure systems: today's capabilities and tomorrow's expectations
Jan Mulkens ; Bob Streefkerk ; Martin Hoogendorp ; Richard Moerman ; Martijn Leenders ; Fred de Jong ; Marco Stavenga ; Herman Boom
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.710-724,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Imaging enhancements by polarized illumination: theory and experimental verification
Carsten Kohler ; Wim de Boeij ; Koen van Ingen-Schenau ; Mark van de Kerkhof ; Jos de Klerk ; Haico Kok ; Geert Swinkels ; Jo Finders ; Jan Mulkens ; Damian Fiolka ; Tilmann Heil
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.734-750,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754