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Conference Proceedings

1. Development of surface micromachining technologies for microfluidics and bioMEMS

Okandan,M. ; Galambos,P. ; Mani,S.S. ; Jakubczak,J.F.

Pub. info.:	Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA. pp.133-139, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4560

Conference Proceedings

2. Optical performance of pivoting micromirrors

Spahn,O.Blum ; Garcia,E.J. ; Esch,V.C. ; Grossetete,G. ; Bitsie,F. ; Mani,S.S. ; Jakubczak,J.F.

Pub. info.:	MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.283-292, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4561

Conference Proceedings

3. Reproducibility data on SUMMiT

Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.

Pub. info.:	Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.102-112, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3874