1.

Conference Proceedings
Conference Proceedings
1. Planar silicon accelerometer with fiber optic sensing: a system-level study
John, J. ; Saha, I. ; Islam, R. ; Joseph, J. ; Lakshmipathy, V.V. ; Kanakaraju, K. ; Jain, Y.K. ; Alex, T.K.
Pub. info.: Smart Materials, Structures, and Systems.  pp.445-449,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5062
2.

Conference Proceedings
Conference Proceedings
2. Anisotropic etching of silicon for accelerometer chip fabrication
Saha, I. ; Joseph, J. ; Islam, R. ; John, J. ; Kanakaraju, K. ; Jain, Y.K. ; Alex, T.K.
Pub. info.: Smart Materials, Structures, and Systems.  pp.360-366,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5062