1.
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Conference Proceedings
|
H. Lee ; Y.-A. Shim ; J.-Y. Choi ; K.-S. Choi ; J. Wu
Pub. info.: |
Photomask technology 2008. 1 pp.712221-1-712221-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
|
2.
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Conference Proceedings
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J. H. Kang ; J.-Y. Choi ; Y.-A. Shim ; H.-S. Lee ; B. Su
Pub. info.: |
Photomask technology 2008. 1 pp.71221N-1-71221N-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
|
3.
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Conference Proceedings
|
J.-Y. Choi ; Y.-A. Shim ; K.-H. Yun ; J.-D. Kim ; J.-H. Kim
Pub. info.: |
Optical Microlithography XXI. 3 pp.69243L-1-69243L-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
|
4.
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Conference Proceedings
|
Y. Kim ; J.-Y. Choi ; J.-D. Kim ; J. Kim ; J.-W. Han
Pub. info.: |
Optical Microlithography XXI. 3 pp.69243J-1-69243J-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6924 |
|
5.
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Conference Proceedings
|
G.-S. Kim ; C.-Y. Won ; J.-Y. Choi ; C. H. Yim
Pub. info.: |
ICMIT 2007, mechatronics, MEMS, and smart materials. 1 pp.67940B-1-67940B-6, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6794 |
|