1.

Conference Proceedings

Conference Proceedings
E. Lee ; J. W. Hahn
Pub. info.: Lithography Asia 2008.  1  pp.71401J-1-71401J-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
2.

Conference Proceedings

Conference Proceedings
Y. Lee ; S. Park ; E. Lee ; K. Kim ; J. W. Hahn
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings

Conference Proceedings
E. Lee ; K. Kim ; J. W. Hahn
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
4.

Conference Proceedings

Conference Proceedings
Y. Kim ; S. Park ; E. Lee ; J. W. Hahn
Pub. info.: Emerging lithographic technologies XII.  2  pp.69212C-1-69212C-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
5.

Conference Proceedings

Conference Proceedings
H. C. Ryoo ; S. Kim ; J. W. Hahn
Pub. info.: Photon processing in microelectronics and photonics VII : 21-24 January 2008, San Jose, California, USA.  pp.68791N-1-68791N-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6879
6.

Conference Proceedings

Conference Proceedings
D. W. Kang ; J. S. Lee ; H.-S. Yang ; J. W. Hahn
Pub. info.: Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA.  pp.68840U-1-68840U-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6884