1.

Conference Proceedings
Conference Proceedings
1. Improving the optical characteristics of bimetallic grayscale photomasks
J. M. Dykes ; D. K. Poon ; J. Wang ; J. T. K. Tsui ; G. H. Chapman
Pub. info.: Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6458
2.

Conference Proceedings
Conference Proceedings
2. Creation of embedded structures in SU-8
J. M. Dykes ; D. K. Poon ; J. Wang ; D. Sameoto ; J. T. K. Tsui ; C. Choo ; G. H. Chapman ; A. M. Parameswaren ; B. L. Gray
Pub. info.: Microfluidics, bioMEMS, and medical microsystems V : 22-24 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6465