1.

Conference Proceedings
Conference Proceedings
1. Chromium(VI)-free Defect Etching Solutions for Application on Engineered Silicon Substrates
J. Maehliss ; A. Abbadie ; F. Brunier ; B.O. Kolbesen
Pub. info.: High Purity Silicon 10.  pp.309-320,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(6)
2.

Conference Proceedings
Conference Proceedings
2. Delineation of Crystalline Defects in Semiconductor Substrates and Thin Films by Chemical Etching Techniques
B. Kolbesen ; D. Possner ; J. Maehliss
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes 7.  pp.195-206,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(3)
3.

Conference Proceedings
Conference Proceedings
3. A Chromium-free Defect Etching Solution for Application on SOI
J. Maehliss ; A. Abbadie ; B. Kolbesen
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.271-278,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)