1.

Conference Proceedings
Conference Proceedings
1. Improving the optical characteristics of bimetallic grayscale photomasks
J. M. Dykes ; D. K. Poon ; J. Wang ; J. T. K. Tsui ; G. H. Chapman
Pub. info.: Photon processing in microelectronics and photonics VI : 22-25 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6458
2.

Conference Proceedings
Conference Proceedings
2. Effects of heated substrates on bimetallic thermal resist for lithography and grayscale photomask applications
J. M. Dykes ; P. Tsui ; J. Leung ; G. H. Chapman
Pub. info.: Photomask technology 2008.  1  pp.71220M-1-71220M-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
3.

Conference Proceedings
Conference Proceedings
3. Bimetallic thermal resists potential for double-exposure immersion lithography and grayscale photomasks
J. M. Dykes ; C. Plesa ; C. Choo ; G. H. Chapman
Pub. info.: Photomask technology 2007.  3  pp.673040-1-673040-10,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
4.

Conference Proceedings
Conference Proceedings
4. Creation of embedded structures in SU-8
J. M. Dykes ; D. K. Poon ; J. Wang ; D. Sameoto ; J. T. K. Tsui ; C. Choo ; G. H. Chapman ; A. M. Parameswaren ; B. L. Gray
Pub. info.: Microfluidics, bioMEMS, and medical microsystems V : 22-24 January 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6465
5.

Conference Proceedings
Conference Proceedings
5. Enhancing direct-write laser control techniques for bimetallic grayscale photomasks
J. M. Dykes ; C. Plesa ; G. H. Chapman
Pub. info.: Advanced fabrication technologies for micro/nano optics and photonics : 21-23 January 2008, San Jose, California, USA.  pp.688312-1-688312-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6883