1.

Conference Proceedings
Conference Proceedings
1. Passive optical detection of ion implantation processing
M. Anjum ; V. Wenner ; J. Lowell
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas.  pp.165-175,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2337
2.

Conference Proceedings
Conference Proceedings
2. Practical, nondestructive method to profile near-surface and subsurface defects in semiconductor wafers
M.A. Nokes ; P. Flesher ; P. Borden ; D. DeBusk ; J. Lowell
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas.  pp.117-128,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2337
3.

Conference Proceedings
Conference Proceedings
3. Surface charge effects in silicon wafer cleaning using surfactant-containing solutions
J.-S. Jeon ; S. Raghavan ; J. Lowell ; V. Wenner
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas.  pp.13-19,  1994.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2337