P. A. Hassanpour ; W. L. Cleghorn ; E. Esmailzadeh ; J. K. Mills
Pub. info.:
21st Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C; Volume 1. 1C pp.2133-2140, 2007. New York, N.Y.. American Society of Mechanical Engineers
MEMS/MOEMS components and their applications IV : 22-23 January 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
P. A. Hassanpour ; W. L. Cleghorn ; E. Esmailzadeh ; J. K. Mills
Pub. info.:
Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering