1.

Conference Proceedings
Conference Proceedings
1. Report of latent contamination factors inducing lithographic variation
J. H. Ryu ; K. J. Seo ; J. S. Ryu ; C. Y. Kim
Pub. info.: Photomask technology 2008.  1  pp.712215-1-712215-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
2.

Conference Proceedings
Conference Proceedings
2. Suspended sediment transport mapped by satellite remote sensing
P. Shanmugam ; Y. H. Ahn ; H. R. Yoo ; B. C. Suk ; J. H. Ryu
Pub. info.: Remote Sensing of Inland, Coastal, and Oceanic Waters.  pp.71501G-1-71501G-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7150
3.

Conference Proceedings
Conference Proceedings
3. Design for CD correction strategy using a resist shrink method via UV irradiation for defect-free photomask
J. H. Ryu ; D. W. Lee ; H. Y. Jung ; S. P. Kim ; O. Han
Pub. info.: Photomask technology 2007.  1  pp.67300K-1-67300K-10,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730