S. Banerjee ; P. Elakkumanan ; D. Chidambarrao ; J. Culp ; M. Orshansky
Pub. info.:
Design for manufacturability through design-process integration II : 28-29 February 2008, San Jose, California, USA. pp.69250K-1-69250K-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering