S. Yang ; J. Kim ; J. Noh ; H. Kim ; S. Lee ; J. Ahn ; K. Hwang ; Y. Shin ; U. Chung ; J. Moon ; D. Lee ; I. Yi ; R. Jung ; S. Kang
Pub. info.:
Atomic layer deposition : at the 208th ECS Meeting, October 16-21, 2005, Los Angeles, California, USA. pp.79-94, 2006. Pennington, N.J.. Electrochemical Society
S. Rajan ; J. Ahn ; V.M. Balasubramaniam ; A. Yousef
Pub. info.:
2005 annual meeting & fall showcase : '05 AIChE, Oct 30 - Nov 4 : conference proceedings, Cincinnati Convention Center, Cincinnati, OH : topical presentation records : T9. Ninth Topical Conference on Food Engineering (CoFE 2005). 2005. New York. American Institute of Chemical Engineers
Photomask and X-ray mask technology II : 20-21 April 1995, Kawasaki City, Kanagawa, Japan. pp.120-124, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering