1.

Conference Proceedings
Conference Proceedings
1. REACTION OF 1,1,1,5,5,5,-HEXAFLUORO-2.4-PENTANEDIONE (hfac) WITH SURFACES OF CuO, Cu2O, AND Cu STUDIED BY XPS
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.272-280,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
2.

Conference Proceedings
Conference Proceedings
2. THE EffECTS ON SURFACES OF SILICON AND SILICON DIOXIDE EXPOSED TO 1,1,1,5,5,5-HEXAFLUORO-2,4-PENTA- NEDIONE
Beck, S.E. ; Gilicinski, A.G. ; Felker, B.S. ; Langan, J.G. ; George, M.A. ; Bohling, D.A. ; Ivankovits, J.C. ; Roberts, D.A.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.264-271,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
3.

Conference Proceedings
Conference Proceedings
3. DRY SURFACE CLEANING OF PLASMA-ETCHED HEMTs
Pearton, S.J. ; Ren, F. ; Katz, A. ; Chakrabarti, U.K. ; Lane, E. ; Hobson, W.S. ; Kopf, R.F. ; Abernathy, C.R. ; Wu, C.S. ; Bohling, D.A. ; Ivankovits, J.C.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.131-138,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
4.

Conference Proceedings
Conference Proceedings
4. Investigation of Reactions of 1,1,1,5,5, 5-Hexafluoro-2,4-Pentanedione (hfac) with Thin Films of CuO and Cu2O
George, M.A. ; Hess, D.W. ; Beck, S.E. ; Ivankovits, J.C. ; Bohling, D.A. ; Felker, B.S. ; Lane, A.P.
Pub. info.: AIchE 1994 Annual Meeting : November 13-18 San Francisco Hilton and Towers Hotel, San Francisco, California.  1994.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1994