1.

Conference Proceedings
Conference Proceedings
1. Use of light scatter signals to identify particle material
Stover,J.C. ; Ivakhnenko,V.I. ; Eremin,Y.A.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.131-139,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
2.

Conference Proceedings
Conference Proceedings
2. Effects of particle shape on particle identification and scatter predictions
Ivakhnenko,V.I. ; Stover,J.C. ; Scheer,C.A. ; Eremin,Y.A.
Pub. info.: Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA.  pp.140-146,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4449
3.

Conference Proceedings
Conference Proceedings
3. Modeling of scatter from small pits of arbitrary shape
Ivakhnenko,V.I. ; Scheer,C.A. ; Stover,J.C.
Pub. info.: Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California.  pp.112-121,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3275
4.

Conference Proceedings
Conference Proceedings
4. Comparison of models and measurements of scatter from surface-bound particles
Scheer,C.A. ; Stover,J.C. ; Ivakhnenko,V.I.
Pub. info.: Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California.  pp.102-111,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3275
5.

Conference Proceedings
Conference Proceedings
5. Comparison of surface PSOs calculated from both AFM profiles and scatter data
Stover,J.C. ; Ivakhnenko,V.I. ; Scheer,C.A.
Pub. info.: Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California.  pp.37-46,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3275
6.

Conference Proceedings
Conference Proceedings
6. Modeled and measured scatter from vias
Stover,J.C. ; Scheer,C.A. ; Ivakhnenko,V.I. ; Eremin,Yu. ; Grishina,N.
Pub. info.: Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California.  pp.65-71,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3619