1.

Conference Proceedings
Conference Proceedings
1. SUPERPLASTICITY IN P/M ALUMINUM ALLOYS
Higashi, K. ; Tanimura, S. ; Ito, T.
Pub. info.: Superplasticity in metals, ceramics, and intermetallics : symposium held April 16-19, 1990, San Francisco, California, U.S.A..  pp.385-390,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 196
2.

Conference Proceedings
Conference Proceedings
2. LOW-TEMPERATURE HETEROEPITAXY OF β-SiC ON Si (111) SUBSTRATES
Eshita, T. ; Suzuki, T. ; Hara, T. ; Mieho, F. ; Furumura, Y. ; Maeda, M. ; Sugii, T. ; Ito, T.
Pub. info.: Heteroepitaxy on silicon : fundamentals, structure, and devices : symposium held April 5-8, 1988, Reno, Nevada, U.S.A..  pp.357-362,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 116
3.

Conference Proceedings
Conference Proceedings
3. *PHOTO-EXCITED CLEANING OF SILICON WITH CHLORINE AND FLUORINE
Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.195-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
4.

Conference Proceedings
Conference Proceedings
4. Improved Synthesis of (Ga)- and (Ga,Al)- Faujasites
Gabelica, Z. ; Norberg, V. ; Ito, T.
Pub. info.: Progress in zeolite and microporous materials : proceedings of the 11th International Zeolite Conference, Seoul, Korea, August 12-17, 1996.  A  pp.285-,  1997.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 105
5.

Conference Proceedings
Conference Proceedings
5. Quantum Chemical Study on Reactions of Small Molecules on Various MgO Surfaces
Kobayashi, H. ; Salahub, D. R. ; Ito, T.
Pub. info.: Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993.  pp.233-,  1994.  Tokyo.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 90
6.

Conference Proceedings
Conference Proceedings
6. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
7.

Conference Proceedings
Conference Proceedings
7. Application of Ultra-rapid Thermal Annealing for Electrical Activation for Next Generation MOSFETs
Suguro, K. ; Ito, T. ; Nishinohara, K. ; Matsuo, K. ; Iinuma, T. ; Itokawa, H. ; Kawase, Y.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.39-49,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
8.

Conference Proceedings
Conference Proceedings
8. Ultra-Shallow Junction Formation by Low Energy Ion Implantation and Flash Lamp Annealing*
Suguro, K. ; Ito, T. ; Itani, T. ; linuma, T.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.253-262,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
9.

Conference Proceedings
Conference Proceedings
9. Reliable Thin-Gate Oxide Films Formed After UV Cleaning
Ito, T. ; Sugino, R. ; Sato, Y.
Pub. info.: Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993.  pp.163-171,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-13
10.

Conference Proceedings
Conference Proceedings
10. CLEANING OF SiO2 BULK LAYERS WITH SUCCESSIVE PROCESSING OF POLY-Si CVD AND UV/Cl2
Sugino, R. ; Tada, Y. ; Ito, T. ; Okui, Y. ; Sakuma, J.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.328-335,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35