1.

Conference Proceedings
Conference Proceedings
1. Development of a Copper CMP Process for Multilevel, Dual Inlaid Metallization in Semiconductor Devices
Selinidis, S.R. ; Watts, D.K. ; Saravia, J. ; Gomez, J. ; Dang, C. ; Islam, R. ; Klein, J. ; Farkas, J.
Pub. info.: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing.  pp.9-18,  1998.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-7
2.

Conference Proceedings
Conference Proceedings
2. Process Control Challenges and Solutions: TEOS, W, and Cu CMP
Angyal, M. ; Boeck, B. ; Cope, J. ; Dang, C. ; Grudowski, P. ; Islam, R. ; Kolagunta, V. ; Mendonca, J. ; Pettinato, C. ; Selinidis, S. ; Smith, B.
Pub. info.: Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.167-172,  2000.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 566
3.

Conference Proceedings
Conference Proceedings
3. Solder bonding for microelectricalmechanical systems (MEMS) applications (Invited Paper)
Goyal, A. ; Tadigadapa, S. ; Islam, R.
Pub. info.: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.281-288,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4980
4.

Conference Proceedings
Conference Proceedings
4. Ultra-thick lithography for advanced packaging and MEMS
Brubaker, C. ; Islam, R. ; Luesebrink, H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.270-276,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
5.

Conference Proceedings
Conference Proceedings
5. Planar silicon accelerometer with fiber optic sensing: a system-level study
John, J. ; Saha, I. ; Islam, R. ; Joseph, J. ; Lakshmipathy, V.V. ; Kanakaraju, K. ; Jain, Y.K. ; Alex, T.K.
Pub. info.: Smart Materials, Structures, and Systems.  pp.445-449,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5062
6.

Conference Proceedings
Conference Proceedings
6. Anisotropic etching of silicon for accelerometer chip fabrication
Saha, I. ; Joseph, J. ; Islam, R. ; John, J. ; Kanakaraju, K. ; Jain, Y.K. ; Alex, T.K.
Pub. info.: Smart Materials, Structures, and Systems.  pp.360-366,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5062