Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.99-104, 1993. Pittsburgh, Pa.. Materials Research Society
Kawanishi, H. ; Sugimoto, Y. ; Ishikawa, T. ; Tanaka, N. ; Hidaka, H.
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Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.. pp.147-152, 1992. Pittsburgh, Pa.. Materials Research Society
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
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Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.105-111, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Shimura, M. ; Ishizaka, Y.
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Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.11-17, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Ohashi, H. ; Senba, Y. ; Ishiguro, E. ; Goto, S. ; Shin, S. ; Ishikawa, T.
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Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.63171A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Matsuyama, S. ; Mimura, H. ; Shimura, M. ; Yumoto, H. ; Katagishi, K. ; Handa, S. ; Shibatani, A. ; Sano, Y. ; Yamamura, K. ; Nishino, Y. ; Tamasaku, K. ; Yabashi, M. ; Ishikawa, T. ; Yamauchi, K.
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Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631719-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Mimura, H. ; Matsuyama, S. ; Yumoto, H. ; Handa, S. ; Shibatani, A. ; Katagishi, K. ; Sano, Y. ; Nishino, Y. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Yamauchi, K.
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Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.631718-631718, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Assoujfid, L. ; Rommeveaux, A. ; Ohashi, H. ; Yamauchi, K. ; Mimura, H. ; Qian, J. ; Hignette, O. ; Ishikawa, T. ; Morawe, C. ; Macrander, A. ; Khounsary, A. ; Goto, S.
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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA. pp.59210J-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering