1.

Conference Proceedings
Conference Proceedings
1. TTR (through the reticle) alignment system with photoresist ablation technique
Tanaka, R. ; Kobayashi, M. ; Yasuda, M. ; Magome, N. ; Ishigo, K. ; Ikegami, H. ; Higashiki, T.
Pub. info.: Optical Microlithography XVII.  pp.1828-1835,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. A new process for accurate alignment using laser ablation technology
Ikegami, H. ; Kawano, K. ; Ishigo, K. ; Higashiki, T. ; Hayasaka, N. ; Yoshitaka, N. ; Kashiwagi, H. ; Kobayashi, M. ; Ogawa, Y. ; Ito, S.
Pub. info.: Optical Microlithography XVII.  pp.960-967,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. Alignment mark signal simulation system for the optimum mark feature selection
Sato, T. ; Endo, A. ; Higashiki, T. ; Ishigo, K. ; Kono, T. ; Sakamoto, T. ; Shioyama, Y. ; Tanaka, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.105-113,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375