1.

Conference Proceedings
Conference Proceedings
1. The current progress of measurement standards for vibration in NMIJ/AIST
Usuda, T. ; Ohta, A. ; Ishigami, T. ; Fuchiwaki, O. ; Misaki, D. ; Aoyama, H. ; Sato, S.
Pub. info.: Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 22-25 June 2004, Ancona, Italy.  pp.30-38,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5503
2.

Conference Proceedings
Conference Proceedings
2. Thin TiN capped Ti-salicide technology for 0.25 μm CMOS/SIMOX
Matsubara, Y. ; Ohnishi, H. ; Ishigami, T. ; Iguchi, M. ; Nakamura, H. ; Horiuchi, T.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.110-118,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
3.

Conference Proceedings
Conference Proceedings
3. Preliminary implementation of primary calibration system for laser vibrometer [6345-03]
Oota, A. ; Usuda, T. ; Ishigami, T. ; Nozato, H. ; Aoyama, H. ; Sato, S.
Pub. info.: Seventh International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 19-22 June 2006, Ancona, Italy.  pp.634503-634503,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6345
4.

Conference Proceedings
Conference Proceedings
4. Reliability of Damascene Copper Interconnects (Invited paper)
Ueno, K. ; Ishigami, T. ; Kakuhara, Y. ; Kawano, M.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.408-418,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06
5.

Conference Proceedings
Conference Proceedings
5. Ti Salicide Technology Using Nitrogen Diffusion from TiN CAP by RTA in an Argon Ambient
Ishigami, T. ; Matsubara, Y. ; Iguchi, M. ; Horiuchi, T.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.517-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
6.

Conference Proceedings
Conference Proceedings
6. In Situ Rapid Thermal Hydrogenation Pretreatment of Ti for Salicide RTA
Ando, K. ; Ishigami, T. ; Matsubara, Y. ; Horiuchi, T. ; Nishimoto, S.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.187-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429