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13 results

Conference Proceedings

1. HILLCOCK FORMATION IN PLATINUM FILMS

Hren, Philip D. ; Al-Shareef, H. ; Rou. S. H. ; Kingonn, A.I ; Buaud, P. ; Irene, E. A.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.575-580, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. Si/SiO2 INTERFACE STUDIES BY IMMERSION ELLIPSOMETRY

Liu, Q. ; Irene, E. A.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.405-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

Conference Proceedings

3. A FRACTAL STUDY OF SILICON SURFACES

Spanos, L. ; Irene, E. A.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.411-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

Conference Proceedings

4. THICKNESS MEASUREMENTS AND OPTICAL CHARACTERIZATION OF THIN POLYMER FILMS

Wall, J. F. ; Brumfield, J. C. ; Murray, R. W. ; Irene, E. A.

Pub. info.:	Polymer/inorganic interfaces : symposium held April 14-16, 1993, San Francisco, California, U.S.A.. pp.221-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	304

Conference Proceedings

5. An Atomic Force Microscopy and Ellipsometry Study of the Nucleation and Growth Mechanism of Polycrystalline Silicon Films on Silicon Dioxide

Basa, C. ; Tinani, M. ; Irene, E. A.

Pub. info.:	Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.199-, 1998. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	525

Conference Proceedings

6. In Situ Real-Time Ellipsometry Study of Dynamic Processes of YBa2Cu3O7-x Thin Films

Gao, Y. ; Mueller, A. H. ; Irene, E. A. ; Auciello, O. ; Krauss, A. R. ; Schultz, J. A.

Pub. info.:	In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.. pp.77-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	569

Conference Proceedings

7. In Situ Real-Time Studies of Nickel Silicide Formation

Tinani, M. ; Irene, E. A. ; Hu, Y. Z. ; Tay, S. P.

Pub. info.:	In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.. pp.121-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	569

Conference Proceedings

8. Fowler-Nordheim Tunneling Current Oscillation Study of Interface Roughness

Lai, L. ; Irene, E. A.

Pub. info.:	Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.221-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	567

Conference Proceedings

9. Combined Spectroscopic Ellipsometry and Ion Beam Surface Analysis for In Situ, Real-Time Characterization of Complex Oxide Film Growth

Mueller, A. H. ; Gao, Y. ; Irene, E. A. ; Auciello, O. ; Krauss, A. R. ; Schultz, J. A.

Pub. info.:	In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A.. pp.15-, 1999. Warrendale, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	569

10.

Conference Proceedings

10. ELLIPSOMETRY STUDIES OF SEMICONDUCTOR SURFACE CLEANING

Irene, E. A. ; Hu, Y. Z.

Pub. info.:	Surface chemical cleaning and passivation for semiconductor processing. pp.393-, 1993. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	315

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