1.

Conference Proceedings
Conference Proceedings
1. Evaluation of Mechanical Properties of Sputtered Ceramic Films from Nanoindentation and Wafer Curvature Techniques
Inturi, Rama B. ; Barnard, John A.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.265-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403
2.

Conference Proceedings
Conference Proceedings
2. Effect of Thickness and Annealing on Stress in Tantalum and Tantalum Nitride Thin Film Hard Coatings
Saha, Ranjana ; Inturi, Rama B. ; Barnard, John A.
Pub. info.: Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.529-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 436
3.

Conference Proceedings
Conference Proceedings
3. Effect of Thickness and Substrates on the Mechanical Properties of Tantalum and Tantalum Nitride Thin Films
Saha, Ranjana ; Inturi, Rama B. ; Barnard, John A.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.259-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403