1.

Conference Proceedings
Conference Proceedings
1. Deposition of SiO2:F:C films with low dielectric constant and with high resistance to annealing
Lubguban, J. ; Kurata, Y. ; Inokuma, T. ; Hasegawa, S.
Pub. info.: Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.57-,  2000.  Warrendale.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 606
2.

Conference Proceedings
Conference Proceedings
2. Effects of CF4 addition on the growth of amorphous CNx films by plasma decomposition of CH4-N2 gas mixtures
Inokuma, T. ; Matsumoto, H. ; Kurita, Y. ; Hasegawa, S.
Pub. info.: Amorphous and nanostructured carbon : sympoisum held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.505-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 593
3.

Conference Proceedings
Conference Proceedings
3. Structure of polycrystalline silicon films by glow-discharge decomposition using SiH4/H2/SiF4 at low temperature
Tsuchida, R. ; Syed, M. ; Inokuma, T. ; Kurata, Y. ; Hasegawa, S.
Pub. info.: Nanophase and nanocomposite materials III : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.199-,  2000.  Pittsburgh, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 581
4.

Conference Proceedings
Conference Proceedings
4. Optical properties of nanocrystalline silicon films with different deposition temperatures
Ali, A. M. ; Inokuma, T. ; Kurata, Y. ; Hasegawa, S.
Pub. info.: Nanophase and nanocomposite materials III : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.565-,  2000.  Pittsburgh, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 581