1.

Conference Proceedings
Conference Proceedings
1. Effects of Additives in KOH Based Electrolytes on Cu ECMP
Tae-Young Kwon ; In-Kwon Kim ; Jin-Goo Park
Pub. info.: Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A..  pp.303-308,  2007.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 991
2.

Conference Proceedings
Conference Proceedings
2. Development and Optimization of Slurry for Ru CMP
In-Kwon Kim ; Tae-Young Kwon ; Jin-Goo Park ; Hyung-Soon Park
Pub. info.: Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A..  pp.283-290,  2007.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 991
3.

Conference Proceedings
Conference Proceedings
3. Effect of Wettability of Poly Silicon on CMP Behavior
Young-Jae Kang ; Bong-Kyun Kang ; In-Kwon Kim ; Jin-Goo Park ; Yi-Koan Hong ; Sang-Yeob Han ; Seong-Kyu Yun ; Bo-Un Yoon ; Chang-Ki Hong
Pub. info.: Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A..  pp.275-282,  2007.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 991