1.

Conference Proceedings
Conference Proceedings
1. Clear-field reticle defect disposition for advanced sub-half-micron lithography
Ibsen,K.B. ; Ilzhoefer,J.R. ; Eickhoff,M.D.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.124-135,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
2.

Conference Proceedings
Conference Proceedings
2. 0.50-ｦﾌm pitch metal integration in 0.18-ｦﾌm technology
DeBord,J.R.D. ; Jayaraman,V. ; Hewson,M.M. ; Lee,W.W. ; Ilzhoefer,J.R.
Pub. info.: Multilevel Interconnect Technology II.  pp.104-109,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3508