1.

Conference Proceedings
Conference Proceedings
1. IMAGING OF DIFFUSION PROCESSES IN DIFFERENTLY CROSS- LINKED POLYSTYRENES BY 1H and 19F-MICROSCOPY
Ilg, M. ; Pfleiderer, B. ; Albert, K. ; Rapp, W. ; Bayer, E.
Pub. info.: Advanced tomographic imaging methods for the analysis of materials : symposium held November 28-30, 1990, Boston, Massachusetts, U.S.A..  pp.27-32,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 217
2.

Conference Proceedings
Conference Proceedings
2. Surface Roughness Evaluation of CVD Doped Oxide Films for Advanced Deep Sub-Micron Semiconductor Applications
Ilg, M. ; Ploessl, R. ; Stuber, J. ; Conti, R. ; Cote, D. ; Gambino, J. ; Tobben, D. ; Kirchoff, M.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.749-755,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
3.

Conference Proceedings
Conference Proceedings
3. Advanced LPCVD BPSG Deposition for Sub-0.25μm Microelectronic Fabrication
Ilg, M. ; Kirchhoff, M. ; Nguyen, S.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.863-868,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
4.

Conference Proceedings
Conference Proceedings
4. Evaluation of Different CVD BPSG Layers for 64M Dram Processing
Kirchhoff, M. ; Ilg, M. ; Cote, D.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.856-862,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5