1.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Kyoh, S. ; Kobayashi, S. ; Inazu, T. ; Ikeuchi, A. ; Urakawa, Y. ; Inoue, S. ; Morita, E. ; Klaver, S. ; Horiuchi, T. ; Peeters, J. ; Kuramoto, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings

Conference Proceedings
Kyoh, S. ; Kotani, T. ; Kobayashi, S. ; Ikeuchi, A. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
3.

Conference Proceedings

Conference Proceedings
Kotani, T. ; Ichikawa, H. ; Urakami, T. ; Nojima, S. ; Kobayashi, S. ; Oikawa, Y. ; Tanaka, S. ; Ikeuchi, A. ; Suzuki, K. ; Inoue, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.628-637,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
4.

Conference Proceedings

Conference Proceedings
Luk-Pat, G. T. ; Miloslavsky, A. ; Ikeuchi, A. ; Suzuki, H. ; Kyoh, S. ; Izuha, K. ; Tseng, F. ; Wen, L.
Pub. info.: Photomask Technology 2006.  pp.634920-634920,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349