1.

Conference Proceedings

Conference Proceedings
Wang, J. ; Watanabe, M. ; Goto, Y. ; Fujii, K. ; Kuriaki, H. ; Satoh, M. ; Ikeda, J. ; Fujimoto, K.
Pub. info.: First International Symposium on High-Power Laser Macroprocessing : 27-31 May 2002, Osaka, Japan.  pp.26-31,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4831
2.

Conference Proceedings

Conference Proceedings
Fujiwara, T. ; Hirayanagi, N. ; Udagawa, J. ; Ikeda, J. ; Shimizu, S. ; Takekoshi, H. ; Suzuki, K.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.468-477,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374