1.

Conference Proceedings
Conference Proceedings
1. Thin TiN capped Ti-salicide technology for 0.25 μm CMOS/SIMOX
Matsubara, Y. ; Ohnishi, H. ; Ishigami, T. ; Iguchi, M. ; Nakamura, H. ; Horiuchi, T.
Pub. info.: Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices.  pp.110-118,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-23
2.

Conference Proceedings
Conference Proceedings
2. Aluminum Wiring Reliability of Fluorinated Amorphous Carbon Interlayer
Iguchi, M. ; Matsubara, Y. ; Ito, S. ; Endo, K. ; Koyanagi, K. ; Kishimoto, K. ; Gomi, H. ; Tatsumi, T. ; Horiuchi, T.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.341-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511
3.

Conference Proceedings
Conference Proceedings
3. Copper Damascene Using Low-Dielectric Constant Fluorinated Amorphous Carbon Interlayer
Matsubara, Y. ; Endo, K. ; Iguchi, M. ; Ito, N. ; Aoyama, K. ; Tatsumi, T. ; Horiuchi, T.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.291-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511
4.

Conference Proceedings
Conference Proceedings
4. Swirling Flow Effect in Immersion Nozzle on Heat and Mass Transport Phenomena in Continuous Casting Mold
Yokoya, S. ; Takagi, S. ; Tsukaguchi, Y. ; Iguchi, M.
Pub. info.: THERMEC '2003 : International Conference on Processing & Manufacturing of Advanced Materials, July 7-11, 2003, Leganés, Madrid, Spain.  pp.1113-1118,  2003.  Zuerich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 426-432
5.

Conference Proceedings
Conference Proceedings
5. Current Status Of Copper Multilevel Interconnects*
Ueno, K. ; Iguchi, M. ; Yokoyama, T. ; Oda, N. ; Miyamoto, H. ; Matsubara, Y. ; Horiuchi, T. ; Saito, S.
Pub. info.: Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology.  pp.1-8,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-17
6.

Conference Proceedings
Conference Proceedings
6. Ti Salicide Technology Using Nitrogen Diffusion from TiN CAP by RTA in an Argon Ambient
Ishigami, T. ; Matsubara, Y. ; Iguchi, M. ; Horiuchi, T.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.517-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
7.

Technical Paper
Technical Paper
7. 2-Way Driven Compressor for Hybrid Vehicle Climate Control System.
Sakai, T. ; Ueda, M. ; Iguchi, M. ; Daniya, T. ; Kanai, A.
Pub. info.: 2004 SAE world congress : technical paper.  2004.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2004
8.

Technical Paper
Technical Paper
8. Ka-band Active Phased Array Antenna for WINDS Satellite
Akaishi, A. ; Iguchi, M. ; Hariu, K. ; Shimada, M. ; Kuroda, T. ; Yajima, M.
Pub. info.: A collection of the 21st AIAA International Communications Satellite Systems Conference and Exhibit technical papers, Yokohama, Japan, 15-19 April 2003.  v. 2  pp.1258-1265,  2003.  Reston, Va.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA International Communications Satellite Systems Conference
Ser. no.: 2003