1.

Conference Proceedings
Conference Proceedings
1. Measurement technique of nontelecentricity of pupil-fill and its application to 60 nm NAND flash memory patterns
Anderson, S. A. ; Neubauer, R. ; Kumar, A. ; Ibrahim, I.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.294-302,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Technical Paper
Technical Paper
2. Penetration, Mixing and Turbulent Structures of Circular and Non-Circular Jets in Cross Flow
Ibrahim, I. ; Murugappan, S. ; Gutmark, E.
Pub. info.: AIAA meeting papers on disc.  2005.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 43rd
3.

Conference Proceedings
Conference Proceedings
3. Quartz etch challenges for 45 nm phase-shift masks [6283-28]
Anderson, A. S. ; Chandrachood, M. ; Grimbergen, M. ; Leung, B. Y. T. ; Ibrahim, I. ; Panayil, S. ; Kumar, A.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.62831X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
4.

Conference Proceedings
Conference Proceedings
4. Quartz etch solutions for 45-nm phase-shift masks [6349-119]
Chandrachood, M. ; Grimbergen, M. ; Leung, T. Y. B. ; Panayil, S. ; Ibrahim, I. ; Kumar, A.
Pub. info.: Photomask Technology 2006.  pp.634934-634934,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
5.

Conference Proceedings
Conference Proceedings
5. Chrome etch solutions for 45-nm and beyond [6349-118]
Chandrachood, M. ; Grimbergen, M. ; Ibrahim, I. ; Panayil, S. ; Kumar, A.
Pub. info.: Photomask Technology 2006.  pp.634933-634933,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
6.

Conference Proceedings
Conference Proceedings
6. Photomask etch and profile control of 65nm chromeless phase lithography masks using scanning probe metrology [5853-58]
Anderson, S. A. ; Buxbaum, A. ; Kumar, A. ; Ibrahim, I.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.731-740,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
7.

Conference Proceedings
Conference Proceedings
7. 65 nm node photomask etching with zero CD process bias [5992-26]
Wu, B ; Chen, J. ; Markovitz, E. ; Xiao, G. ; Tam, S. ; Kumar, A. ; Ibrahim, I. ; Yau, W. -F.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920P-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
8.

Conference Proceedings
Conference Proceedings
8. Evaluation of quartz dry etching performance for next generation phase-shift mask applications [5992-27]
Anderson, S. A. ; Konishi, T. ; Koch, R. ; Yokoi, S. ; Kumar, A. ; Ibrahim, I.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59920Q-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
9.

Conference Proceedings
Conference Proceedings
9. A novel process of etching EUV masks for future generation technology [6349-201]
Wu, B. ; Kumar, A. ; Chandrachood, M. ; Ibrahim, I. ; Sabharwal, A.
Pub. info.: Photomask Technology 2006.  pp.634909-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349