1.

Conference Proceedings
Conference Proceedings
1. Photo-Induced CVD of Tantalum Pentoxide Dielectric Films Using an Injection Liquid Source
Zhang, J-Y. ; Boyd, I. W. ; Mooney, M. B. ; Hurley, P. K. ; O'Sullivan, B. J. ; Beechinor, J. T. ; Kelly, P. V. ; Crean, G. M. ; Senateur, J-P.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.397-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
2.

Conference Proceedings
Conference Proceedings
2. The Impact of Rapid Thermal Annealing on the Properties of the Si (100)-SiO2 Interface
Hurley, P. K. ; Leveugle, C. ; Mathewson, A. ; Doyle, D. ; Whiston, S. ; Prendergast, J. ; Lundgren, P.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.659-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
3.

Conference Proceedings
Conference Proceedings
3. UV Assisted Rapid Thermal Processing of Strontium Bismuth Tantalate (SBT) Thin Films
O'Brien, S. ; Hurley, P. K. ; Crean, G. M. ; Johnson, J. ; Caputa, C. ; Wouters, D.
Pub. info.: Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A..  pp.177-182,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 830