1.

Conference Proceedings
Conference Proceedings
1. FLOATING TEMPERATURE DEPOSITION OF DEVICE QUALITY SiO2 THIN FILM BY DECR PLASMA
Agius, B. ; Hugon, M.C. ; Jiang, N. ; Varniere, F. ; Plais, F. ; Pribat, D. ; Froment, M. ; Puech, M.
Pub. info.: Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A..  pp.181-186,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 284
2.

Conference Proceedings
Conference Proceedings
2. Electrical Properties of Si3N4 Deposited by DECR PECVD on InP
Delmotte, F. ; Hugon, M.C. ; Agius, B. ; Courant, J.L.
Pub. info.: Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII).  pp.236-241,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-21
3.

Conference Proceedings
Conference Proceedings
3. Physical and Electrical Properties of DECR Plasma Deposited SiNx:H Films on Si and InP
Delmotte, F. ; Hugon, M.C. ; Sitbon, S. ; Agius, B. ; Courant, J.L.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.675-687,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
4.

Conference Proceedings
Conference Proceedings
4. Interface and Volume Defects in SiNx:H/<100>Si Prepared by DECR Plasma Deposition
Aubert, P. ; Delmotte, F. ; Hugon, M.C. ; Agius, B. ; Cantin, J.L. ; von Bardeleben, H.J.
Pub. info.: Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes.  pp.283-291,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-30
5.

Conference Proceedings
Conference Proceedings
5. Recent Developments in Ionized Physical Vapor Deposition: Concepts, Determination of the Ionisation Efficiency and Improvement of Deposited Films
Bretagne, J. ; Boisse-Laporte, C. ; de Poucques, L. ; Gousset, G. ; Hugon, M.C. ; Imbert, J.C. ; Leroy, O. ; Teule-Gay, L. ; Touzeau, M. ; Vasina, P. ; Voldoire, O.
Pub. info.: Nanostructured thin films and nanodispersion strengthened coatings.  pp.113-122,  2004.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 155
6.

Conference Proceedings
Conference Proceedings
6. Oxidation Resistance Of TaSiN Diffusion Barriers For Stacked Capacitors
Letendu, F. ; Hugon, M.C. ; Agius, B. ; Vickridge, I. ; Ayguavives, F. ; Kingon, A.I.
Pub. info.: Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 655