1.

Conference Proceedings
Conference Proceedings
1. Revisiting F2 laser for DUV microlithography
Hofmann,T. ; Hueber,J.-M. ; Das,P.P. ; Scholler,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.541-546,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Performance of very high repetition rate ArF lasers
Hueber,J.-M. ; Besaucele,H. ; Das,P.P. ; Eis,R. ; Ershov,A.I. ; Fleurov,V.B. ; Gaidarenko,D. ; Hofmann,T. ; Melcher,P.C. ; Partlo,W.N. ; Nikolaus,B.K. ; Smith,S. ; Webb,K.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1418-1423,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000