1.

Conference Proceedings
Conference Proceedings
1. PsmLint: bringing AltPSM benefits to the IC design stage
Ghosh, P. ; Kang, C. ; Sanie, M. ; Huckabay, J.A.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.314-325,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042
2.

Conference Proceedings
Conference Proceedings
2. Physical and timing verification of subwavelength-scale designs: I. Lithography impact on MOSFETs
Pack, R.C. ; Axelrad, V. ; Shibkov, A. ; Boksha, V.V. ; Huckabay, J.A. ; Salik, R. ; Staud, W. ; Wang, R. ; Grobman, W.D.
Pub. info.: Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA.  pp.51-62,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5042