1.

Conference Proceedings
Conference Proceedings
1. Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS
Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.306-314,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
2.

Conference Proceedings
Conference Proceedings
2. Electrothermal modeling of a microbridge gas sensor
Manginell,R.P. ; Smith,J.H. ; Ricco,A.J. ; Hughes,R.C. ; Moreno,D.J. ; Huber,R.J.
Pub. info.: Micromachined Devices and Components III.  pp.360-371,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224
3.

Conference Proceedings
Conference Proceedings
3. Parallel-plate electrostatic dual-mass resonator
Dyck,C.W. ; Allen,J.J. ; Huber,R.J.
Pub. info.: Micromachined Devices and Components V.  pp.198-209,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876