Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.355-, 1999. Warrendale, PA. MRS - Materials Research Society
Maa, J-S. ; Ulrich, B. ; Stecker, L. ; Stecker, G. ; Hsu, S. T.
Pub. info.:
Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.29-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.549-, 1999. Warrendale, PA. MRS - Materials Research Society
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.579-, 1999. Warrendale, PA. MRS - Materials Research Society
Li, T. K. ; Hsu, S. T. ; Lee, J. J. ; Gao, H. F. ; Engelhard, M.
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Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A.. pp.443-, 2000. Warrendale, PA. MRS-Materials Research Society
Levy, R. A. ; Narayan, M. ; Karim, M. Z. ; Hsu, S. T.
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Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.469-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
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Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A.. pp.3-8, 2003. Warrendale, PA. Materials Research Society
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
Pub. info.:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.135-140, 2003. Warrendale, Pa.. Materials Research Society