1.

Conference Proceedings
Conference Proceedings
1. Comparison between mechanical method and chemical-assisted mechanical method for CVD diamond film polishing
Hsieh, C.-H. ; Tsai, H.-Y. ; Lai, H.-T. ; Lin, H.-Y.
Pub. info.: Nano- and Microtechnology: Materials, Processes, Packaging, and Systems.  pp.337-344,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4936
2.

Conference Proceedings
Conference Proceedings
2. Defect dispositiong using mask printability analysis on alternating phase-shifting masks
Chang, C.-H. ; Hsieh, C.-H. ; Tzu, S.-D. ; Dai, C.-M. ; Lin, B. J. ; Pang, L. ; Qian, Q.-D. ; Chen, J.-H. ; Huang, J. H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.622-629,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754