1.

Conference Proceedings
Conference Proceedings
1. LIGA:metals,plastics,and ceramics
Hruby,J.M. ; Griffiths,S.K. ; Domeier,L.A. ; Morales,A.M. ; Boehme,D.R. ; Bankert,M.A. ; Bonivert,W.D. ; Hachmann,J.T. ; Skala,D.M. ; Ting,A.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.32-43,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings
Conference Proceedings
2. Optimum doses and mask thickness for synchrotron exposure of PMMA resists
Griffiths,S.K. ; Hruby,J.M. ; Ting,A.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.498-507,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
3.

Conference Proceedings
Conference Proceedings
3. Transport limitations in electrodeposition for LIGA microdevice fabrication
Griffiths,S.K. ; Nilson,R.H. ; Bradshaw,R.W. ; Ting,A. ; Bonivert,O. ; Hachmann,J.T. ; Hruby,J.M.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.364-375,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of miniaturized electrostatic deflectors using LIGA
Jackson,K.H. ; Malek,C.Khan ; Murray,L.P. ; Bonivert,W.D. ; Hruby,J.M. ; Hachmann,J.T. ; Chang,T.H.P.
Pub. info.: Microlithography and Metrology in Micromachining.  pp.204-213,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640
5.

Conference Proceedings
Conference Proceedings
5. Fine pitch grids for an x-ray solar imaging spectrometer fabricated by optical lithography and XeF2 etching
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Pister,K.S.J. ; Kruglick,E.
Pub. info.: Microlithography and Metrology in Micromachining.  pp.226-235,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640
6.

Conference Proceedings
Conference Proceedings
6. Fabricating subcollimating grids for an x-ray solar imaging spectrometer using LIGA techniques
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Scholz,M.L. ; Stowe,T.D. ; Kenny,T.W. ; Jackson,K.H. ; Malek,C.Khan
Pub. info.: Microlithography and Metrology in Micromachining.  pp.214-225,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2640