1.

Conference Proceedings
Conference Proceedings
1. Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators
Kolesar,E.S. ; Ruff,M.D. ; Ko,S.Y. ; Wilks,R.J. ; Howard,J.T. ; Allen,P.B. ; Wilken,J.M. ; Bosch,J.E.
Pub. info.: MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK.  pp.310-321,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4407
2.

Conference Proceedings
Conference Proceedings
2. Optical binary switch and amplitude modulator micromirror arrays
Kolesar,E.S. ; Allen,P.B. ; Boydston,N.C. ; Howard,J.T. ; Ko,S.Y. ; Wilken,J.M.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.365-374,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878
3.

Conference Proceedings
Conference Proceedings
3. Theoretical and experimental characterization of the in-plane tip force and deflection achieved with asymmetrical polysilicon electrothermal microactuators
Allen,P.B. ; Boydston,N.C. ; Howard,J.T. ; Ko,S.Y. ; Kolesar,E.S. ; Ruff,M.D. ; Wilken,J.M. ; Wilks,R.J.
Pub. info.: Micromachined Devices and Components VI.  pp.148-158,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4176