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12 results

Conference Proceedings

1. Design and manufacturing of actuating beams with mirror and electrodes with mirror support pyramid on substrate for optical switch

Horie, M. ; Gozu, T. ; Kamiya, D.

Pub. info.:	Optomechatronic systems III : 12-14 November 2002, Stuttgart, Germany. pp.205-212, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4902

Conference Proceedings

2. Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]

Antos, R. ; Ohlidal, I. ; Mistrik, J. ; Yamaguchi, T. ; Visnovsky, S. ; Yamaguchi, S. ; Horie, M.

Pub. info.:	Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany. pp.59652B-, 2005. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5965

Conference Proceedings

3. Spectral ellipsometry of binary optic gratings

Pistora, J. ; Yamaguchi, T. ; Vlcek, J. ; Mistrik, J. ; Horie, M. ; Smatko, V. ; Kovacova, E. ; Postava, K. ; Aoyama, M.

Pub. info.:	13th Polish-Czech-Slovak conference on wave and quantum aspects of contemporary optics : 9-13 September 2002, Krzyżowa. Poland. pp.415-422, 2003. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5259

Conference Proceedings

4. RECYCLE PROCESSES FOR METAL FUELS BY DISSOLUTION INTO ORGANIC SOLUTION

Sano, Y. ; Hayami, Y. ; Miyake, C. ; Horie, M.

Pub. info.:	Scientific basis for nuclear waste management XVIII : symposium held October 23-27, 1994, Kyoto, Japan. pp.1355-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	353

Conference Proceedings

5. Film Thickness Monitor for CMP Processing

Atsuta, H. ; Hayashi, T. ; Hondo, N. ; Horie, M. ; Kimura, H. ; Okumura, K. ; Tsujimura, M. ; Yano, H. ; Yoshida, M.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.233-246, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566

Technical Paper

6. Stratification Features of Swirl Nozzle Sprays and Slit Nozzle Spray in DI Gasoline Combustion.

Sami, H. ; Takano, T. ; Horie, M. ; Shiraishi, N. ; Higuchi, Y. ; Kawamura, K.

Pub. info.:	2003 International Fuels and Lubricants Meeting : SAE technical paper. 2003. Warrendale, Penn.. Society of Automotive Engineers
Title of ser.:	Society of Automotive Engineers technical paper series
Ser. no.:	2003

Conference Proceedings

7. Airy-like internal reflection series applied in scatterometry and simulations of gratings [5858-35]

Antos, R. ; Mistrik, J. ; Yamaguchi, T. ; Horie, M. ; Visnovsky, S.

Pub. info.:	Nano- and Micro-Metrology. pp.58580Y-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5858

Conference Proceedings

8. Measurement of the dielectric function spectra of low dielectric constant using the spectroscopic ellipsometry

Horie, M. ; Postava, K. ; Yamaguchi, T. ; Akashika, K. ; Hayashi, H. ; Kitamura, F.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVII. 2 pp.803-809, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5038

Conference Proceedings

9. Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch

Kamiya, D. ; Bagheri, S. ; Horie, M.

Pub. info.:	MEMS, MOEMS, and Micromachining. pp.137-146, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5455

10.

Conference Proceedings

10. Novel inspection technology for half pitch 55 nm and below

Kinoshita, A. ; Kitamura, F. ; Horie, M. ; Yoshida, T.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XIX. pp.174-182, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5752

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Author: Horie, M.