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Processing science of advanced ceramics : symposium held April 27-28, 1989, San Diego, California, U.S.A.. pp.3-12, 1989. Pittsburgh, Pa.. Materials Research Society
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Processing science of advanced ceramics : symposium held April 27-28, 1989, San Diego, California, U.S.A.. pp.343-352, 1989. Pittsburgh, Pa.. Materials Research Society
Hori, S. ; Miyahara, O. ; Kiba, Y. ; Ono, Y. ; Kitano, J. ; Miyoshi, S. ; Furukawa, T. ; Itani, T.
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Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.646-652, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering