Chen, Wei ; Hooker, Joe ; Monarch, Kathy ; Fejes, Peter ; Chu, Peir
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Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.. pp.187-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Wang, Xiang-Dong ; Xie, Qianghua ; Hooker, Joe ; Lu, Shifeng ; Lee, J.J. ; Tobin, Phil ; Liu, Wei ; Cross, Linda
Pub. info.:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.93-98, 2003. Warrendale, Pa.. Materials Research Society