1.

Conference Proceedings
Conference Proceedings
1. Viability of conventional high-NA KrF imaging for sub-0.25-ｦﾌm lithography
Farrell,T.R. ; Nunes,R. ; Campbell,R. ; Hoh,P. ; Samuels,D.J. ; Kirk,J.P. ; Conley,W.E. ; Iba,J. ; Shibata,T.
Pub. info.: Optical Microlithography IX.  Part1  pp.46-53,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
2.

Conference Proceedings
Conference Proceedings
2. Challenge of 1-Gb DRAM development when using optical lithography
Farrell,T.R. ; Nunes,R. ; Samuels,D.J. ; Thomas,A. ; Ferguson,R.A. ; Molless,A. ; Wong,A.K. ; Conley,W. ; Wheeler,D.C. ; Credendino,S. ; Naeem,M. ; Hoh,P. ; Lu,Z.
Pub. info.: Optical Microlithography X.  pp.333-341,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051