Hofmann, F. A. ; Gibson, W. M. ; Lee, S. M. ; MacDonald, C. A. ; Ullrich, J. B. ; Gao, N.
Pub. info.:
Thin-films : stresses and mechanical properties VII : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.3-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Hofmann, F. A. ; Gao, N. ; Owens, S. M. ; Gibson, W. M. ; MacDonald, C. A. ; Lee, S. M.
Pub. info.:
In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.. pp.133-, 1998. Warrendale, Pa.. MRS - Materials Research Society