Search records | 東京工業大学附属図書館文献データベース

Sort order

2 results

Conference Proceedings

1. CHARACTERIZATION OF PROCESS UNIFORMITY AND CONTROL OF TITANIUM SILICIDE FORMED BY RAPID THERMAL PROCESSING (RTP)

Hodul, David ; Mehta, Sandeelp

Pub. info.:	Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.183-190, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	92

Conference Proceedings

2. PROCESS AND EQUIPMENT ISSUES IN RAPID THERMAL OXIDATION (RTO)

Mehta, Sandeep ; Hodul, David

Pub. info.:	Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.95-102, 1987. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	92