1.

Conference Proceedings

Conference Proceedings
Hiruta,K. ; Kubo,S. ; Iwamatsu,T. ; Fujisawa,T. ; Sugiyama,M. ; Morimoto,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part2  pp.853-857,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings

Conference Proceedings
Kvbo,S. ; Hiruta,K. ; Sugiyama,M. ; Iwamatsu,T. ; Fujisawa,T. ; Morimoto,H.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.532-541,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings

Conference Proceedings
Fujisawa,T. ; Iwamatsu,T. ; Hiruta,K. ; Morimoto,H. ; Harashima,N. ; Sasaki,T. ; Hara,M. ; Yamashiro,K. ; Ohkubo,Y. ; Takehana,Y.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.549-552,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
4.

Conference Proceedings

Conference Proceedings
Hiruta,K. ; Kubo,S. ; Morimoto,H. ; Yasaka,A. ; Hagiwara,R. ; Adachi,T. ; Morikawa,Y. ; Iwase,K. ; Hayashi,N.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.523-530,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
5.

Conference Proceedings

Conference Proceedings
Sugiyama,M. ; Kubo,S. ; Hiruta,K. ; Iwamatsu,T. ; Fujisawa,T. ; Morimoto,H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.180-187,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
6.

Conference Proceedings

Conference Proceedings
Iwamatsu,T. ; Fujisawa,T. ; Hiruta,K. ; Morimoto,H. ; Harashima,N. ; sasaki,T. ; Hara,M. ; Yamashiro,K. ; Ohkubo,Y. ; Takehana,Y.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.235-242,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
7.

Conference Proceedings

Conference Proceedings
Kubo,S. ; Hiruta,K. ; Morimoto,H. ; Yasaka,A. ; Hagiwara,R. ; Adachi,T. ; Morikawa,Y. ; Iwase,K. ; Hayashi,N.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.158-164,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
8.

Conference Proceedings

Conference Proceedings
Iwamatsu,T. ; Hiruta,K. ; Morimoto,H. ; Ataka,M. ; Nitta,J.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.505-512,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546